Micro-usinage tridimensionnel de verres photosensibles par laser femtoseconde.

摘要

In this work, we present a new method of three-dimensional micromachining of photosensitive glasses by femtosecond laser. Processing of photosensitive glasses requires three main steps, namely photosensitization of material, heat treatment and etching. By controlling the process parameters, it is possible to make embedded microchannels with a diameter as small as 10 mum. The material used in this work is called Foturan which is a lithium alumnosilicate glass doped with a small amount of Ce3+, Ag+ and Sb +. The research works described in this master thesis are about photosensitization mechanism of Foturan by femtosecond laser, the influence of laser parameters on the microstructures dimensions and MEMS conception inside Foturan.; It was possible by scanning electron microscopy to determine the critical fluence of photosensitization (Fc = 0,48 J/cm2 for one pulse) and to show that FcmN = Dc where N is the number of pulses and Dc the critical dose ((1.2 +/- 0,1) * 10-2 J6/cm12). The exponent m was determined to be six. (Abstract shortened by UMI.)