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DISPOSITIF DE REVÊTEMENT POUR RÉALISER UN REVÊTEMENT À BASSE TEMPÉRATURE TRÈS EFFICACE
DISPOSITIF DE REVÊTEMENT POUR RÉALISER UN REVÊTEMENT À BASSE TEMPÉRATURE TRÈS EFFICACE
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摘要
The present invention relates to a coating device comprising a vacuum coating chamber for conducting vacuum coating processes, said vacuum coating chamber comprising: - one or more cooled chamber walls 1 having an inner side 1 b and a cooled side 1 a, - protection shields being arranged in the interior of the chamber as one or more removable shielding plates 2, which cover at least part of the surface of the inner side 1 b of the one or more cooled chamber walls 1, wherein at least one removable shielding plate 2 is placed forming a gap 8 in relation to the surface of the inner side 1 b of the cooled chamber wall 1 that is covered by said removable shielding plate 2, wherein: - thermal conductive means 9 are arranged filling the gap 8 in an extension corresponding to at least a portion of the total surface of the inner side 1 b of the cooled chamber wall 1 that is covered by said removable shielding plate 2, wherein the thermal conductive means 9 enable conductive heat transfer between said removable shielding plate 2 and the respectively covered cooled chamber wall 1.
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