首页> 外国专利> DISPOSITIF DE REVÊTEMENT POUR RÉALISER UN REVÊTEMENT À BASSE TEMPÉRATURE TRÈS EFFICACE

DISPOSITIF DE REVÊTEMENT POUR RÉALISER UN REVÊTEMENT À BASSE TEMPÉRATURE TRÈS EFFICACE

摘要

The present invention relates to a coating device comprising a vacuum coating chamber for conducting vacuum coating processes, said vacuum coating chamber comprising: - one or more cooled chamber walls 1 having an inner side 1 b and a cooled side 1 a, - protection shields being arranged in the interior of the chamber as one or more removable shielding plates 2, which cover at least part of the surface of the inner side 1 b of the one or more cooled chamber walls 1, wherein at least one removable shielding plate 2 is placed forming a gap 8 in relation to the surface of the inner side 1 b of the cooled chamber wall 1 that is covered by said removable shielding plate 2, wherein: - thermal conductive means 9 are arranged filling the gap 8 in an extension corresponding to at least a portion of the total surface of the inner side 1 b of the cooled chamber wall 1 that is covered by said removable shielding plate 2, wherein the thermal conductive means 9 enable conductive heat transfer between said removable shielding plate 2 and the respectively covered cooled chamber wall 1.

著录项

  • 公开/公告号EP3662094A1

    专利类型

  • 公开/公告日2020.06.10

    原文格式PDF

  • 申请/专利权人

    申请/专利号EP18752439.2

  • 发明设计人

    申请日2018.08.02

  • 分类号

  • 国家 EP

  • 入库时间 2022-08-21 10:54:46

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