CAPTEUR DE GAZ À ÉLÉMENT EN PORTE-À-FAUX UNIQUE, RÉSEAU DE CAPTEURS ET PROCÉDÉ DE PRÉPARATION DE CAPTEUR

摘要

The present invention discloses a single cantilever gas sensor, including a silicon substrate, a supporting film, a heating resistor, a isolation film, and a detecting electrode, which are successively stacked. The gas sensor is T-shaped and has a base structure and a cantilever structure. The end portion of the cantilever structure is provided with a gas sensitive material. The present invention further provides a sensor array composed of the single cantilever gas sensors and a method for manufacturing the gas sensor. The method includes (1) selecting a silicon substrate; (2) preparing a supporting film; (3) preparing a heating resistor; (4) preparing an isolation film; (5) preparing a detecting electrode; (6) releasing a membrane; (7) loading a gas sensitive material. The present invention has the advantages of low power consumption of sensor, small size, high integration degree, simple production process, easy positioning, which can effectively improve the production efficiency.