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CADRE DE PELLICULE, PELLICULE LE CONTENANT, PROCÉDÉ DE PRODUCTION DE CADRE DE PELLICULE, ET PROCÉDÉ DE PRODUCTION DE PELLICULE
CADRE DE PELLICULE, PELLICULE LE CONTENANT, PROCÉDÉ DE PRODUCTION DE CADRE DE PELLICULE, ET PROCÉDÉ DE PRODUCTION DE PELLICULE
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摘要
The purpose of the present invention is to provide: a pellicle frame which is not susceptible to deterioration even if irradiated with short-wavelength light such as excimer light, and which is not susceptible to generation of an outgas or foreign substance; and a pellicle which uses this pellicle frame. In order to achieve the above-described purpose, this pellicle frame for supporting the outer periphery of a pellicle film is configured to comprise a frame and a film that is formed on the surface of the frame and contains a polyimide resin.
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