GYROSCOPE MICRO-ÉLECTROMÉCANIQUE PERMETTANT LA DÉTECTION DE VITESSE ANGULAIRE ET PROCÉDÉ DE DÉTECTION DE VITESSE ANGULAIRE

摘要

A microelectromechanical gyroscope includes: a substrate (2); a stator sensing structure (16b) fixed to the substrate (2); a first mass (7) elastically constrained to the substrate (2) and movable with respect to the substrate (2) in a first direction (D1); a second mass (8) elastically constrained to the first mass (7) and movable with respect to the first mass (7) in a second direction (D2); and a third mass (10) elastically constrained to the second mass (8) and to the substrate (2) and capacitively coupled to the stator sensing structure (16b), the third mass (10) being movable with respect to the substrate (2) in the second direction (D2) and with respect to the second mass (8) in the first direction (D1).