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Mechanical Characterization of the Heat Affected Zone of Gold Wirebonds Using Nanoindentation

机译:纳米压痕法对金键合热影响区的力学表征

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With increasing miniaturization in microelectronics the wirebonds used in IC packages are witnessing a thrust towards fine pitch wirebonding. To have a precise control over loop height of the wirebond for fine pitch wirebonding, it is imperative to do mechanical characterization of the wirebond. The present work studies the mechanical properties of gold wire and wirebond using nanoindentation. The wirebond specimen surface was planarized using mechanical polishing. The loop height of the gold wirebond is directly proportional to the length of the heat affected zone (HAZ) above the ball of gold wirebond. Metallographic preparation of gold wirebond cross section reveals the presence of undesirable coarse grain structure in HAZ due to recrystallization and grain growth in the gold wire adjacent to the ball. The recrystallization temperature of our gold wire was found using D.S.C. to be 340.66°C. The doping elements present in the gold wire used, were identified using TOF-SIMS. Nanoindentation of the gold wire was done at different maximum loads to observe the hardness variation with load. The nanoindentation of gold wirebond has confirmed a v-shaped hardness profile in the HAZ. The hardness minima for the particular gold wire used with a ball size ratio of 2.4 was observed at distance of 160-170 µm from the neck of the ball. The elastic modulus was found to vary randomly and to be independent of the microstructure in the wirebond. A yield stress profile based on empirical hardness-yield strength correlation has been predicted for the gold wirebond.
机译:随着微电子器件的小型化程度的提高,用于IC封装的引线键合正朝着精细间距引线键合的方向发展。为了精确控制引线键合的环路高度以实现细间距引线键合,必须对引线键合进行机械表征。本工作研究使用纳米压痕的金线和丝焊的机械性能。使用机械抛光将引线键合样品表面平坦化。金丝键合的回路高度与金丝键合球上方的热影响区(HAZ)的长度成正比。金丝键合横截面的金相制备表明,由于邻近球的金丝中的重结晶和晶粒长大,在热影响区中存在不希望的粗大晶粒结构。我们的金线的重结晶温度是使用D.S.C.达到340.66°C。使用TOF-SIMS识别所使用的金线中存在的掺杂元素。在不同的最大载荷下对金线进行纳米压痕,以观察硬度随载荷的变化。金丝键合的纳米压痕已经证实了热影响区的v形硬度分布。在距球颈160-170 µm的距离处观察到球径比为2.4的特定金线的最低硬度。发现弹性模量随机变化并且独立于引线键合中的微观结构。已经预测了金丝键合的基于经验硬度-屈服强度相关性的屈服应力曲线。

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