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Specific Character and Limits of Some Techniques Used for the Analysis of Thin Films

机译:薄膜分析技术的特点和局限性

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摘要

Spectroscopic techniques for the analysis of composition, electronic structure, short range order, and microstructure of thin films are reviewed. Electron spectrometry; absorption spectrometry; emission spectrometry with ion bombardment; and X-ray diffraction, diffusion, and resonance absorption are considered.

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