Measurement of Partial Pressures in Vacuum Technology and Vacuum Physics

摘要

It is pointed out that the measurement of gaseous pressures of less than 0.0001 torr is based on the ionization of gas atoms and molecules due to collisions with electrons. The particle density is determined in place of the pressure. The ionization cross sections for molecules of various gases are discussed. It is found that the true pressure in a vacuum system cannot be determined with certainty if it is unknown which gas is present. Effects of partial pressure determination on the condition of the vacuum system are discussed together with ion sources, systems of separation, and ion detection.