Fiber-optic projected-fringe digital interferometry

摘要

A phase-stepped projected-fringe interferometer was developed which uses a closed-loop fiber-optic phase-control system to make very accurate surface profile measurements. The closed-loop phase-control system greatly reduces phase-stepping error, which is frequently the dominant source of error in digital interferometers. Two beams emitted from a fiber-optic coupler are combined to form an interference fringe pattern on a diffusely reflecting object. Reflections off of the fibers' output faces are used to create a phase-indicating signal for the closed-loop optical phase controller. The controller steps the phase difference between the two beams by pi/2 radians in order to determine the object's surface profile using a solid-state camera and a computer. The system combines the ease of alignment and automated data reduction of phase-stepping projected-fringe interferometry with the greatly improved phase-stepping accuracy of our closed-loop phase-controller. The system is demonstrated by measuring the profile of a plate containing several convex surfaces whose heights range from 15 to 25 micron high.