Evaluation of Relative Sensitivity of SAW and Flexural Plate Wave Devices for Atmospheric Sensing

摘要

The objective of this project is to evaluate the suitability of the ultrasonic flexural plate wave (FPW) device as the detector in a gas chromatograph (GC). Of particular interest is the detection of nitrous oxide (N2O). From experimental results we conclude analyte detection is achieved through two mechanisms: changes in gas density, and mass loading of the device membrane due to the sorption of gas molecules. Reducing the dead volume of the FPW chamber increased the FPW response. A comparison of the FPW response to that of the surface acoustic wave (SAW) detector provided with the GC (made by MSI, Microsensor Technologies, Inc.), shows that for unseparated N2O in N2, the FPW exhibits a sensitivity that is at least 550 times greater than that of the SAW device. A Porapak Q column was found to separate N2O from its carrier gas, N2 or He. With the Porapak Q column, a coated FPW detected 1 ppm N2O in N2 or He, with a response magnitude of 7 Hz. A coated SAW exhibited a response of 25 Hz to pure N2O. The minimal detectable N2O concentrations of the sensors were not evaluated.