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Study high dielectric constant thin film capacitor materials Final report

机译：研究高介电常数薄膜电容器材料最终报告

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High vacuum approach for high dielectric constant thin film capacitor fabrication to reduce microcircuit size

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作者
Radke, R. P.;
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年度 1967
页码 1-73
总页数 73
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
CAPACITORS; CRYSTALLOGRAPHY; FABRICATION; HIGH VACUUM; MICROELECTRONICS; PERMITTIVITY; THIN FILMS; CAPACITOR; DIELECTRIC CONSTANT; HIGH VACUUM; THIN FILM;

机译：电容器;结晶学;制造;高真空;微电子;介电常数;薄膜;电容器;介电常数;高真空;薄膜;

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专利

1. Impact of time dependent dielectric breakdown and stress-induced leakage current on the reliability of high dielectric constant (Ba,Sr)TiO/sub 3/ thin-film capacitors for Gbit-scale DRAMs [J] . Yamamichi S., Yamamichi A. IEEE Transactions on Electron Devices . 1999,第2期

机译：时间依赖性介质击穿和应力引起的泄漏电流对Gbit级DRAM高介电常数（Ba，Sr）TiO / sub 3 /薄膜电容器可靠性的影响
2. Tunable dielectric constant of polyimide-barium titanate nanocomposite materials as the gate dielectrics for organic thin film transistor applications [J] . Yu Yang-Yen, Liu Cheng-Liang, Chen Yung-Chih, RSC Advances . 2014,第107期

机译：聚酰亚胺-钛酸钡纳米复合材料作为有机薄膜晶体管应用的栅极电介质的可调介电常数
3. Spin-coated periodic mesoporous organosilica thin films - Towards a new generation of low-dielectric-constant materials [J] . Hatton BD, Landskron K, Whitnall W, Advanced Functional Materials . 2005,第5期

机译：旋涂周期性介孔有机硅薄膜-面向新一代低介电常数材料
4. Gigabit-scale DRAM capacitor technology with high dielectric constant thin films by a novel conformal deposition technique [C] . Hayashi, S., Huffman, . 1994

机译：采用新型共形沉积技术的具有高介电常数薄膜的千兆规模DRAM电容器技术
5. Materials science, integration, and performance characterization of high-dielectric constant thin film based devices. [D] . Fan, Wei. 2004

机译：高介电常数薄膜基器件的材料科学，集成和性能表征。
6. Giant Dielectric Constant of Copper Nanowires/AmorphousSiO2 Composite Thin Films for Supercapacitor Application [O] . Anupam Maity, Subha Samanta, Shubham Roy, 2020

机译：铜纳米线/非晶态的巨介电常数用于超级电容器的SiO2复合薄膜
7. Vacuum Equipment and Application for Thin Film in the Multimedia. Deposition Technique for Capacitor Films with High Dielectric Constant. [O] . Takaaki KAWAHARA 1997

机译：多媒体薄膜真空设备及应用。高介电常数的电容膜沉积技术。

Study high dielectric constant thin film capacitor materials Final report

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