Advanced failure analysis laboratory equipment networking

摘要

Today's integrated circuits are so complex that it is often necessary to have access to the layouts and schematics when performing voltage contrast, cross sectioning, light emission, mechanical probing, optical beam induced current, and even simple SEM and Optical Examination. To deal with these issues, Sandia National Laboratories is developing an advanced failure analysis laboratory networking scheme to provide computer control, layout navigation, schematic navigation, and report generation on each of the major pieces of failure analysis equipment. This concept is known as an Integrated Diagnostic Environment or IDE. An integrated diagnostic environment is an environment where failure analysis equipment is computer-controlled and linked by a high speed network. The network allows CAD databases to be shared between instruments, improving the failure analyst's productivity on each analysis task. At Sandia, we are implementing this concept using SUN Sparcstation computers running Schlumberger's IDE software. To date, we have incorporated our electron beam prober and light emission system into the environment. We will soon add our scanning optical microscope and focused ion beam system and eventually add our optical microscope and microprobe station into the network. There are a number of issues to consider when implementing an Integrated Diagnostic Environment; these are discussed in detail in this paper.