Vibratory response of a precision double-multi-layer monochromator positioning system using a generic modeling program with experimental verification.

摘要

A generic vibratory response-modeling program has been developed as a tool for designing high-precision optical positioning systems. The systems are modeled as rigid-body structures connected by linear non-rigid elements such as complex actuators and bearings. The full dynamic properties of each non-rigid element are determined experimentally or theoretically, then integrated into the program as inertial and stiffness matrices. Thus, it is possible to have a suite of standardize structural elements for modeling many different positioning systems that use standardized components. This paper will present the application of this program to a double-multi-layer monochromator positioning system that utilizes standardized components. Calculated results are compared to experimental modal analysis results.