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Demonstration of lithographic patterning in measurements of general and localized corrosion on alloy 22

机译:在合金22的一般和局部腐蚀的测量中证明光刻图案

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We have demonstrated a new technique capable of detecting generalized corrosion of metallographically-polished materials with nanometer-scale precision. After exposing a lithographically-patterned coupon of Alloy 22 to an electrolyte in a potentiostatically-controlled cell for twenty-four hours, we detected the loss of up to 130nm of metal. In addition, 'wormholes' were detected at certain points of intersection of three grain boundaries.

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