Modeling a Dry Etch Process for Large-Area Devices

摘要

There has been considerable interest in developing dry processes which can211u001eeffectively replace wet processing in the manufacture of large area photovoltaic 211u001edevices. Environmental and health issues are a driver for this activity because 211u001ewet processes generally increase worker exposure to toxic and hazardous chemicals 211u001eand generate large volumes of liquid hazardous waste. Our work has been directed 211u001etoward improving the performance of screen-printed solar cells while using plasma 211u001eprocessing to reduce hazardous chemical usage.