THICKNESS MEASUREMENT OF THIN POLYMER FILMS USING A SEMICONDUCTOR ALPHA DETECTOR

摘要

Various kinds of thin polymer films have been used in recent years. They have been used for condensers, magnetic tapes, insulating materials and others in the field of electric industry and the window materials of the radiation counters, the supporting film of the radioactive sources and others in the field of atomic energy. Consequently, the measuring method of. film thickness with accuracy and rapidity has been required.nAs a method like this, these is a method that retains the distance between the sources and the detector constant and measures the change of pressure of air between these6) . In this case, the cut off near the range is more sharp than the former as the incident angle of cc -rays to the detector does not vary.