Characterizing the Hardness and Modulus of Thin Films Using a Mechanical Properties Microprobe

摘要

A new ultra-low load microindentation system has been acquired in the Metals and Ceramics Division of ORNL. The system's spacial resolution and its data acquisition capabilities allow the determination of several mechanical properties from submicron volumes of materials; hence, the term mechanical properties microprobe (MPM). In this paper we demonstrate the ability of such a system to measure the modulus and hardness of an ion implanted sapphire specimen. The implantation process results in an amorphous surface layer 155 nm thick. The hardness and modulus of the amorphous Al sub 2 O sup 3 are 10 and 200 GPa, respectively. This represents a 60% reduction in hardness and a 50% reduction in modulus as compared to the unimplanted material. (ERA citation 12:020916)