Impedance-power effects on plasma polymer surface finish using a helical resonator discharge.

摘要

Plasma polymerized organic coatings are used in the fabrication of targets for experiments in the Inertial Confinement Fusion (ICF) program at Lawrence Livermore National Laboratory. The authors are performing experiments to understand the process conditions leading to the preparation of smooth ((approx)100(Angstrom)) plasma polymer surfaces while maintaining the highest deposition rate possible. It had been reported by Howling et al., that the formation of particulate matter in the deposition of silicon by the plasma reaction of silane affected the plasma impedance. This suggested that experiments designed to examine the correlation of surface texture with plasma impedance would be of interest. Furthermore, it is possible that an impedance change may cause a change in the power coupling efficiency from the transmitter to the plasma. Preliminary work in the authors laboratory indicated that the reactor temperature influenced the surface texture. The focus of this paper is to carefully examine the effects of reactor temperature on the surface texture of the plasma polymer, ensuring constant reactor conditions especially with respect to rf power.