Plasma Micromachined MEMS for Intelligent Diagnostic Sensors

摘要

In Microelectromechanical Systems (MEMS), integrated circuit processingtechnology is utilized to fabricate silicon microstructures that are released from the underlying substrate such that they are free to move in one or more dimensions. This technology therefore enables the integration of mechanical and electronic components in a single integrated circuit style device. MEMS is an ideal technology for intelligent diagnostic sensor applications. It provides the capability for high resolution sensors for a variety of physical phenomena (e.g., pressure and acceleration) in a small package with integrated electronics. In volume production, MEMS devices can reach low unit costs enabling large arrays of such devices to be used in practical industrial monitoring applications. On-chip electronics increases device intelligence as well as offering the possibility of remote sensing and local decision making.