Quantum Dot Array Formation through Biomolecular Nanopatterning

摘要

Report developed under SBIR contract for Topic A98-028: The objective is to demonstrate the feasibility of forming precisely ordered and precisely located arrays of semiconductor quantum dots by using biomolecular templates and Low Energy Electron Enhanced Etching (LE4) to define in a substrate an array of holes with diameters comparable to the size of quantum dots sought, and then growing one quantum dot in each 'nanohole', by self-assembly of deposited adatoms. In Phase I, key methodology was developed: (1) depositing the biomolecular templates on clean(hydrophobic) Si(100) surfaces; (2) identifying LE4 process conditions for etching the nano-pattern; (3) stripping the template- generated masks after LE4 by wet chemical methods. Phase I Option emphasized: (1) removal of the oxide left on the nano-patterned substrate by the stripping process; (2) preliminary efforts to deposit Ce and GaAs quantum dots; (3) scaling the nano-patterning and deposition processes to cover 1-in. diameter substrates. These quantum dot arrays have potential applications in optical emitters and detectors, single electron transistors, and high-density memory arrays.