Semiconductor YBACUO Uncooled Focal Plane Arrays

摘要

The research has developed a readout circuit design, microbolometer designs, fabricated the readout circuits utilizing the - MOSIS foundry service, tested the readout circuits, integrated microbolometers onto the readout circuit and tested microbolometers fabricated on the readout circuits. The readout circuit was designed according to the MOSIS AMI 1.6 micrometers low noise analog CMOS design rules. The readout circuits were designed using capacitive transimpedance amplifiers (CTIA) and constant current buffered direct injection (CCBDI) schemes. Microbolometers were designed to have a detectivity of 10 cmHz 1/2/W with a 200Hz cutoff and 10 9 cmHz1/2/W with a 30 Hz cutoff. This was accomplished with the substitution of only one different mask during the microbolometer fabrication thereby varying the length of the electrode arms. The operational readout circuits were fabricated in a third job submission to MOSIS. The fabrication of microbolometers on the readout circuit does not affect the electrical characteristics of the readout circuit indicating a post-CMOS compatible fabrication process. Test bolometers fabricated on a readout circuit were tested and have displayed responsivity.