Piezoelectric Shear Surface Wave Grating Resonators.

摘要

This paper describes a new type of surface acoustic wave grating resonator in which the particle displacement of the surface wave is parallel to the surface. By contrast, the now well-known SAW (Rayleigh wave) grating resonator has its particle displacement in the saggital plane. In the SAW resonator the function of the grating stucture, which consits of either grooves or metal strips, is to provide two highly reflecting Rayleigh wave mirrors, between which a standing wave is excited by means of an interdigital transducer. The basic function of the grating in the horizontal shear (SH) type of surface wave resonator considered here is quite different. An SH surface wave cannot exist on a homogeneous (unlayered) substrate in the absence of some periodic variation, such as grating, along the surface.