Mechanisms for Amorphous State Formation in Ion Implanted Silicon.

摘要

A summary is given of the results obtained on this grant. Various experiments were performed to better understand the mechanisms which are important to the crystalline to amorphous transformation produced by ion implantation. From these experiments have emerged several important concepts and processes. These have been reported in several publications and talks, and it has been possible to interpret the results in terms of a composite model for the amorphization transformation.