Proposal for a Profile Interchange Format. Part 1. Syntax. Part 2. Semantics

摘要

This paper examines issues in the design and implementation of a Profile Interchange Format (PIF) for use in the standard representation of semiconductor profile and attribute information. A distinction is made between the syntax and the semantics of the representation; both facets of the PIF are discussed. Part I examines syntactic issues of the PIF. The decision has been to develop two versions of the format: an ASCII format (for exchange of information), and a binary format (for local use by individual CAD tools). For the ASCII form, a highly restricted LISP like syntax is chosen to capture hierarchy and to ease parsing of the structure. A binary version of the format called SNC has been prototyped, and allows highly efficient storage and access of PIF information. While the binary and ASCII syntatic mechanisms have been implemented, work remains to define a standard semantics (an organization and minimum set of names and data) for the exchange of process and device simulation information. Part II examines issues in the semantic representation of semiconductor profile and device and profile data. Topics examined included general geometry representation, association of attribute information with arbitrary parts of the geometry, a definition reference mechanism, and transformation specification. Finally, additional syntax issues in the specification of a PIF standard are discussed.