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Applied Photoelasticity for Residual Stress Measurement inside Crystal Silicon Wafers for Solar Applications

机译:应用光弹性在太阳能晶体硅晶片内部残余应力测量中的应用

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A full automated NIR polariscope has been specially built for residual stress measurement in crystal silicon wafers for solar applications. The multiple configurations of the instrument allow measuring both the isoclinic and the isochromatic parameters on a full field. A new algorithm has also been developed to extract the maximal shear stress inside the silicon wafers without linking the isoclinic parameter to the isochromatic parameter. Hence, it is straightforward to use and the extraction errors are reduced. Coupling this improved data analysis with the comprehensive capabilities of the test rig, allowed to show that the effect of the cutting process on the residual stress inside the silicon wafers is predominant compared with the effect of the cast process, related to the thermal gradient and impurities.
机译:专为太阳能应用中的晶体硅晶片中的残余应力测量而专门制造的全自动近红外偏光镜。仪器的多种配置允许在全场上测量等斜和等色参数。还开发了一种新算法来提取硅晶片内部的最大剪切应力,而无需将等斜度参数链接到等色度参数。因此,它易于使用并且提取误差减少。将此改进的数据分析与测试设备的综合功能相结合,可以证明,与浇铸工艺的影响相比,切割工艺对硅片内部残余应力的影响要大得多,这与热梯度和杂质有关。

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