Multi-DOF and sub-micrometer piezoelectric-electrorheological stepper motor

摘要

A new type of piezoelectric-electrorheologicaI plane stepper motor combining the piezoelectric effect with the electrorheological effect is proposed in this paper. Four electrorheological clampers and four multilayer piezoelectric actuators are designed in the prototype motor. Based on a bionic inchworm movement mechanism, when these electrorheological clampers are combined with piezoelectric actuators in different ways, the movements in the x-direction, the y-direction and z-rotation with a long travel stroke of 100 and 0.36 mum resolution can be completed. The maximum moving speed and driving force of the prototype motor are 1.8 mm min(-1) and 100 gf, respectively. The steady stepper velocity and instant motion image are measured by a CCD optical measuring system from 0.2 to 23 mum s(-1). The motor may be applied in fields such as MEMs, optical manipulator, manipulator in SEM or STM, laser adjustor, micromachining, etc.