Invited Paper. Super Grain Silicon Technology for AMOLED TV Applications

摘要

Super Grain Silicon (SGS) technology has been developed for TFT backplanes for large area AMOLED TVs. PMOS TFTs based on the SGS method have mobility above 50 cm~2/V-s and off-current below 10~(12) A, which enable mass production of AMOLED TVs on next generation fabs. Pixel-to-pixel brightness uniformity, related to leakage current and grain boundaries, was improved from below 85% to above 90%. △V_(th) and brightness uniformity of 14" TV panels are 1.13V and 83%, respectively, over the entire Gen. 6 area. Potential and technical issues of the SGS process for AMOLED TVs will be further discussed.