Due to the explosive growth of Projection Displays large volume production of precision optical components such as cold mirrors, RGB color filters, UV/IR Blockers and anti-reflection coatings are in short supply. This supply constraint for Projection Displays is driven by the simultaneous need for high quality optical thin films that can withstand the extreme operating environments of high powered light engines and the precise optical filters required to meet the optical performance of these systems. Conventional evaporation or ion-assist evaporation thin film deposition techniques either do not meet the cost/volume requirements or the environmental stability for Projection Display systems. We introduce a unique reactive sputtering process that meets both the cost/volume and quality requirements for Projection Displays. We demonstrate this process's throughput capability for manufacturing cold mirrors, UV/IR blockers, and RGB filters that are stable under the extreme operating conditions expected for Projection Display light engines. We present spectral results for as-deposited filters and after exposure to operational environmental tests. We also present throughput for various optical components utilized in projection displays.
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