Decoupled microgyros and the design principle DAVED

摘要

This paper reports the surface micromachined gyroscopes realized by HSG-IMIT according to the patented decoupling principle decoupled angular velocity detector (DAVED) [1]. The latest DAVED prototypes realized with a special SOI-technology show a RMS noise below 0.025degrees/s (50 Hz bandwidth) and a bias stability of +/-0.3degrees/s over the temperature range. Thus, the target specification (comparable to electronic stability program (ESP) requirements) is met. Further, a novel and advanced design concept is presented which can be viewed as a doubly decoupling scheme. The goal of decoupling is to reduce the so-called quadrature signal and thus improve the sensor performance, especially, the temperature sensitivity. This advancement will be necessary to meet the demands of future applications, like, advanced driver assistance system (ADAS) or to partially replace fiber optic gyroscopes, for example, within autonomous guided vehicles. (C) 2002 Elsevier Science B.V. All rights reserved. [References: 25]