Low-temperature semiconductor mechanical sensors

摘要

The electrical and piezoresistive properties of silicon and germanium microcrystals grown in form of semiconductor whiskers were studied in the temperature range of 4.2-300 K. Piezoresistive mechanical sensors — on the basis of semiconductor microcrystals — that can operate at low temperatures including cryogenic temperature range have been developed: highly-sensitive strain gauges, pressure sensors for cryogenic media and level sensors of cryogenic liquids. Design examples and sensor performances are presented.