A simulation approach is presented, which permits the simulation of spatially distributed fields with behavioral models of other physical effects and accompanying electronics within a single simulator environment. The final system-level model is a blend of finite-element, analytical, semi-analytical and parametric behavioral models with complex analogue and digital circuit networks. Previously evaluated calculations revealed successful simulation of finite element models with more than 25 000 nodes by using analogue simulators with hardware description language. The relative error of static calculations in comparison with commercial finite element simulators is better than 0.002% and 0.08% for 2 D and 3 D models, respectively. The results obtained in transient model verification proved the accuracy of the method. The simulation of the flow sensor system, whose functionality is governed by coupled fluidic-thermal-electric domains, is employed to show the feasibility of the method for complex microsystem modeling.
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