High-resolution miniaturized inductive proximity sensor: characterization and application for step-motor control

摘要

A resolution better than 50 nm has been achieved with a new miniaturized inductive proximity sensor. This sensor microsystem is made of a l mm diameter coil connected to a new and highly sensitive ASIC based on a differential relaxation oscillator. Lateral as well as axial resolutions have been characterized. A microsystem for step-motor control with an accuracy better than 2° is demonstrated. This application is not affected by the temperature behaviour of the sensor. # 1998 Elsevier Science S.A. All rights reserved.