Ultra-high sensitivity intra-grain poly-diamond piezoresistors

摘要

Chemical vapor deposited (CVD) polycrystalline diamond is inexpensive and can become a commercially viable piezoresistive sensor material if its typical gauge factor (GF) exceeds that of Crystalline Si sad SiC. In this paper, a study of GF of B-doped polycrystalline diamond film leads to an intra-grain GF above 4000, which is(comparable to GF of single Crystal p-type diamond. This result, reported for the first time, shows that large-grain (50-80μm) CVD diamond can be used to build inexpensive ultra-high sensitivity piezoresistive sensors. # 1998 Elsevier Science S.A. All rights reserved.