Magnetron sputter deposition of WC-Ag and TiC-Ag coatings and their frictional properties in vacuum environments

摘要

Thin films of WC-Ag and TiC-Ag were deposited by magnetron sputtering for the purpose of analyzing their tribological properties in vacuum. X-ray diffraction was used to determine structural properties, and energy dispersive X-ray analysis was used to determine the relative atomic content of silver in the films. Pin on disk friction tests were performed to obtain the coefficient of friction in vacuum. The deposited films showed a structure containing separate carbide/silver phases, as was desired for providing both high wear resistance and low friction. The tribological test results show a significant decrease in the friction coefficient for both TiC-Ag and WC-Ag, to a minimum value of 0.2, with increasing silver content.