Effect of zirconia addition on dielectric loss and microstructure of aluminum nitride ceramics

摘要

The effects of sintering additives on dielectric loss tangent of A1N ceramics have been investigated. Different amounts of Y_2O_3 and ZrO_2 were added as sintering additives to ALN powder and pressureless sintering was performed at 1900 deg C for 2 h in a flowing nitrogen atmosphere. ZrN phase was detected in A1N ceramics when ZrO_2 addition was more than 0.1 mol. percent. Densification behavior of both Y_2O_3 and ZrO_2 doped A1N ceramics was found to be a little complicated, however addition of ZrO_2 was effective in the densification of the A1N ceramics, tan delta is found to increase from less than 1 x 10~(-3) to around 6 x 10~(-3) when ZrO_2 content was more than 0.1 mol. percent.