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Optical coherence tomography as a method of quality inspection for printed electronics products

机译:光学相干断层扫描作为印刷电子产品质量检查的一种方法

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摘要

Application of time domain, ultra high resolution optical coherence tomography (UHR-OCT) in printed electronics products' quality inspection is demonstrated. Presented study was done using experimental UHR-OCT device based on a Kerr-lens mode locked Ti:sapphire femtosecond laser, photonic crystal fibre and modified, free-space Michelson interferometer. Possibilities of the technique are demonstrated by analysis of an RF antenna-example of printed electronics products. Measurements were done with submicron axial resolution, offered by UHR-OCT system developed in our laboratory. Such high resolution is necessary due to the thickness of material layers used in printed electronics. In addition to tomography imaging, numerical results were compared with data provided by two commercially available measurement devices: Wyko NT3300 optical profiler and Dektak 8 stylus profiler (both Veeco). Comparison of profile heights and their spatial correlation is presented. Ability for full volumetric reconstruction and accuracy justified with reference measurements prove OCT to be a reliable tool in printed electronics product testing.
机译:演示了时域超高分辨率光学相干断层扫描(UHR-OCT)在印刷电子产品质量检查中的应用。本研究是使用实验性UHR-OCT设备完成的,该设备基于Kerr-lens锁模Ti:蓝宝石飞秒激光器,光子晶体光纤和改进的自由空间迈克尔逊干涉仪。通过分析RF天线(例如印刷电子产品的示例)可以证明该技术的可能性。测量是在我们实验室开发的UHR-OCT系统提供的亚微米轴向分辨率下进行的。由于用于印刷电子设备的材料层的厚度,这种高分辨率是必需的。除断层摄影成像外,还将数值结果与两种市售测量设备提供的数据进行比较:Wyko NT3300光学轮廓仪和Dektak 8测针轮廓仪(均为Veeco)。介绍了轮廓高度及其空间相关性的比较。完全体积重建的能力和通过参考测量证明的准确性证明了OCT是印刷电子产品测试中的可靠工具。

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