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首页> 外文期刊>Optics and Spectroscopy >Calculation of the Parameters of Excimer Light Sources on the Basis of a Positive Column Glow Discharge
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Calculation of the Parameters of Excimer Light Sources on the Basis of a Positive Column Glow Discharge

机译:基于正列辉光放电计算准分子光源的参数

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We calculate the concentration of plasma and gas-temperature components in a contracted filament of a glow capillary discharge (R velence 0.75 mm) in xenon for pressures of P velence 100 and 400 Torr and currents of I velence 6-15 mA for cases of with and without cryogenic cooling of the discharge. We find that the gas temperature in the channel of the glow discharge has a value of 1000-2000 K, the concentration of xenon excimers attains a maximum at the boundary of the filament with a value of 10~(10)-10~(11) cm~(-3), and the efficiency of electric energy transformation into excimer radiation energy has a value of 0.1-5percent.
机译:对于压力为100和400 Torr,电流为6-15 mA的氙气,我们计算了氙气中辉光毛细管放电(R velence 0.75 mm)的收缩丝中等离子体和气体温度成分的浓度。而且没有低温冷却的排放。我们发现辉光放电通道中的气体温度值为1000-2000 K,氙准分子的浓度在灯丝边界处达到最大值,值为10〜(10)-10〜(11厘米〜(-3),电能转化为准分子辐射能的效率值为0.1-5%。

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