A Multiwavelength Low-Pressure Radiation Source Based on Argon and Xenon Chlorides

摘要

The characteristics of an excimer radiation source pumped by a subnormal dc glow discharge in an Ar/Xe/Cl_(2) mixture with the source operating in a spectral range of 160-310 nm were studied. The emission intensities of the 175,236,258, and 308 nm bands due to the transitions ArCl (B-X), XeCl (D-X), Cl_(2) (D′-A′), and XeCl (B-X), respectively, were optimized in relation to the pressure, composition, and discharge current of the mixture.