Study of Regularities in Spectra of Sputtered Excited Chromium and Molybdenum Atoms

摘要

Ion-induced optical emission spectra excited by the bombardment of Cr and Mo surfaces with 40-keV Cr~+ and Xe~+ ions are studied in the region of 380-600 nm. Efficiencies of excitation of atomic energy levels in sputtering processes and equilibrium plasma are compared. In sputtering, the excitation of electrons of the d shell is found to be more efficient. Possible mechanisms of this phenomenon are discussed.