The aberration theory of a combined electron focusing-deflection system with a rotating deflection field following the rotation of the electrons

摘要

A new type of combined magnetic focusing-electrostatic deflection systems whose orientation of deflection field is rotated synchronously with the beam electrons is proposed. This rotation deflection field can be formed by twistification of tube wall electrode (TWE) deflectors. Formulae are derived for the first-order optical properties, third-order geometrical aberrations and first-order chromatic aberrations of this system. A program was written in FORTRAN for numerical computation. An example is given; the computation results show that compared to the conventional systems, the proposed new system has lower deflection aberration coefficients. (c) 2006 Elsevier GmbH. All rights reserved.