A contact inspection system for aspheric optical components

摘要

We construct a contact inspection system and realize low contact force and high precision measurements for aspheric optical components. The inspection and calibration principles, as well as the reliability of the system are thoroughly studied. Our investigations show that the system could provide low contact force measurement,(low than 0.7 mN), fast scanning speed (2 minis), and high accuracy (as low as 0.5 mu m), being a good option to the contact inspections of aspheric optical components. (C) 2016 Elsevier GmbH. All rights reserved.