We have fabricated a novel device that acts as a quarter-wave plate at normal incidence and as a polarizing beam splitter at an angle of incidence of similar to 40 deg. The device is made from a multilayer (SiO2/Si3N4) surface-relief zeroth-order one-dimensional grating with a period of 0.3 mu m. The device is designed for an operating wavelength of 632.8 nm. We designed the device by using rigorous coupled-wave analysis and fabricated it by direct-write electron-beam lithography and reactive ion etching. Measurements confirmed the performance of the device as a wave plate and as a polarizing beam splitter. (C) 1998 Optical Society of America. [References: 6]
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机译：我们已经制造出一种新颖的装置，该装置在垂直入射时充当四分之一波片，在入射角接近40度时充当偏振分束器。该装置由周期为0.3μm的多层（SiO 2 / Si 3 N 4）表面浮雕的零阶一维光栅制成。该设备设计用于632.8 nm的工作波长。我们通过严格的耦合波分析设计了该器件，并通过直接写入电子束光刻和反应离子刻蚀来制造它。测量证实了该装置作为波片和偏振分束器的性能。 （C）1998年美国眼镜学会。 [参考：6]
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