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Experimental and theoretical investigation of the drilling of alumina ceramic using Nd:YAG pulsed laser

机译:Nd:YAG脉冲激光打孔氧化铝陶瓷的实验和理论研究

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Alumina ceramics have found wide range of applications from semiconductors, communication technologies, medical devices, automotive to aerospace industries. Processing of alumina ceramics is rather difficult due to its high degree of brittleness, hardness, low thermal diffusivity and conductivity. Rapid improvements in laser technologies in recent years make the laser among the most convenient processing tools for difficult-to-machine materials such as hardened metals, ceramics and composites. This is particularly evident as lasers have become an inexpensive and controllable alternative to conventional hole drilling methods. This paper reports theoretical and experimental results of drilling the alumina ceramic with thicknesses of 5 mm and 10.5 mm using milisecond pulsed Nd:YAG laser. Effects of the laser peak power, pulse duration, repetition rate and focal plane position have been determined using optical and Scanning Electron Microscopy (SEM) images taken from cross-sections of the drilled alumina ceramic samples. In addition to dimensional analysis of the samples, microstructural investigations have also been examined. It has been observed that, the depth of the crater can be controlled as a function of the peak power and the pulse duration for a single laser pulse application without any defect. Crater depth can be increased by increasing the number of laser pulses with some defects. In addition to experimental work, conditions have been simulated using ANYS FLUENT package providing results, which are in good agreement with the experimental results.
机译:氧化铝陶瓷已经发现了从半导体,通信技术,医疗设备,汽车到航空航天工业的广泛应用。由于氧化铝陶瓷的高度脆性,硬度,低热扩散性和导电性,其加工相当困难。近年来,激光技术的飞速发展使激光成为对难加工材料(如硬化金属,陶瓷和复合材料)最方便的加工工具。由于激光已成为常规钻孔方法的廉价且可控制的替代品,因此这一点尤为明显。本文报道了使用毫秒脉冲Nd:YAG激光器对5mm和10.5mm厚度的氧化铝陶瓷进行钻孔的理论和实验结果。激光峰值功率,脉冲持续时间,重复频率和焦平面位置的影响已使用光学和扫描电子显微镜(SEM)图像确定,这些图像是从钻孔的氧化铝陶瓷样品的横截面中获取的。除了对样品进行尺寸分析外,还检查了微观结构。已经观察到,对于单个激光脉冲施加而没有任何缺陷,可以根据峰值功率和脉冲持续时间来控制弹坑的深度。可以通过增加带有某些缺陷的激光脉冲的数量来增加弹坑的深度。除实验工作外,还使用ANYS FLUENT软件包对条件进行了模拟,并提供了与实验结果非常吻合的结果。

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