Subsurface defect detection in ceramics by high-speed high-resolution optical coherent tomography

摘要

We use optical coherence tomography with a new configuration to determine the size and location of subsurface defects in solid ceramic and composite ceramic materials. Cross-sectional subsurface regions either parallel or perpendicular to the surface were examined. We present experimental results showing that the size and distribution of small subsurface defects can be determined with depth and lateral resolutions of 10 and 4 mu m, respectively. (C) 1997 Optical Society of America