New magnetron sputtering systems for high throughput AR coating

摘要

Magnetron sputtering is a key thin film deposition technology widely acknowledged to produce the highest quality optical coatings. In this article, the authors describe the high throughput CFM reactive sputtering process for anti-reflection coating that is scaleable and allows any sized laboratory to participate. Compared to previous strategies, the CFM process does not need an auxiliary ion or plasma source, making it much more simple and less expensive. It also produces AR coatings with outstanding optical properties and durability. Anti-reflection coating is popular with spectacle wearers because it reduces reflection and glare. Lenses are also cosmetically more appealing with an AR coating. Over recent years, most international markets have seen growth in the proportion of spectacles treated with an AR coating. As a result, coatings are becoming an increasingly important activity in optical laboratories. Magnetron sputtering is a key deposition technology and the technique of choice in most areas of surface coating. It is used routinely in semiconductor processing and is also used to coat flat glass for architectural and automotive applications. The technique is more energetic than conventional electron beam evaporation and as a result it produces denser and more durable coatings. Sputtering systems have already been introduced to the industry for small batch, fast turnaround AR coating for retail opticians and small laboratories. Also, lens manufacturers are using huge, industrial scale sputtering systems for AR coating stock lenses in volume. This article describes a new approach by UK-based Applied Multilayers Ltd that is scaleable and that now allows the advantages of sputtering to be accessed by laboratories of all sizes.