Theoretical principles of operational technology for ultrafine edged-tool machining of extended metal optic surfaces

摘要

Development of finish machining methods has in recent years been based on use of ultraprecision equipment and nanotechnology for machining precision machine and instrument parts whose surface dimensional, conformational, and positional accuracy is measured in micrometers of fractions of a micrometer. The characteristic objects of such technologies, besides gyroscopes, computer components, and high-speed precision electrical and pneumatic drives (spindles) are metal optic components for laser resonators and optical focusing systems. The requirements imposed on such optical components are consonant with their purpose: shape deviations of tenths of a micrometer; a mean profile asperity height of less than 10 nm; and a surface reflectivity of up to 99% at a radiation wavelength of 10.6 μm. The optical surface of such components can be flat, spherical, aspherical, or conic or have some other form. Surface layer accuracy and quality requirements for machined surfaces become more stringent as the wavelength of the incident laser radiation decreases.