Pore characterization of a microporous SiON membrane derived from polysiloxazane via thermal pyrolysis: prospects for hydrogen separation

摘要

We investigated the pore properties of inorganic membranes used in thehydrogen separation industry. A microporous SiON membrane derived from a preceramic polysiloxazane was pyrolyzed for the analysis of the porosity characteristics. The involved reactions were studied using a combination of thermogravimetry and infrared spectroscopy of the solids. The SiON membrane showed a dense microporous structure and successfully formed a coating layer of pores on the intermediate membrane. The BET surface area and pore volume showed maximum values (653.4 m~2/g and 0.35 cm~3/g, respectively) at a pyrolysis temperature of 500 °C.