Optically transparent electrically conductive coatings

摘要

For certain applications, for example glass surfaces with reduced heat loss or anti-glare and reduced reflectivity, coatings with defined optical and electrical properties are called for. Most commonly employed for such purposes is indium oxidedoped with tin (ITO) which is laid down as a film using reactive sputtering. The film properties can be monitored during the sputtering process in order to achieve the desired values.