We study the effect of the rarefaction of an oxygen-containing medium (0.001 to 10 Pa) on the formation of oxynitrides on the surface of VT1-0 titanium and its OT4, PT-7M, VT20, and VT6s alloys in the course of modification of nitrides formed in molecular nitrogen at a temperature of 850 deg C. The initiation of titanium oxynitrides becomes more intense as the rarefaction increases from 10 to 0.001 Pa. We also show that the surface microhardness increases after oxynitriding as compared with nitriding, and the depth of the hardened layer is determined by isothermal holding in nitrogen.
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