Deep UV nano-microstructuring of substrates for surface plasmon resonance imaging

摘要

In this paper, we describe wafer-scale fabrication and characterization of plasmonic chips - containing different sizes and spacings of metallic micro-and nanoline structures - using deep UV lithography. Using a high dose (25mJcm ~(-2)) and a proper lift-off process, feature sizes as small as 25nm are obtained. Moreover, we study the dependence of surface plasmon resonance on the angle of incidence and wavelength for different micro-and nanoline size and spacing values, yielding localized to quasi-propagative plasmonic behaviors. Rigorous coupled wave analysis (RCWA) techniques are employed to numerically confirm these experimental observations. Finally, the refractive index of media around the SPRI sensor chips is varied, showing the angulo-spectral regions of higher sensitivity for each type of structure.